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Sucking Down Methods for Bowed Wafer - Coggle Diagram
Sucking Down Methods for Bowed Wafer
Sucking Down Methods
Vacuum-based Methods
Standardized Vacuum Chucking
Localized Vacuum Chucking
Suction Cups
Distributed Suction Cup Array
Adjustable Suction Cup Positions
Electrostatic Chuck
Mechanical Press
Spring loaded Mechanisms
Leveling Systems
Hydraulic Leveling Systems
Active Flatness Control Systems
Others
Adhesive Bonding Methods
Thermal Flattening
Bow Type
Convex Bow
Concave Bow
S-Curve (cylindrical) Bow
Helical (twisted) Bow
Wave Bow
Edge Bow