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Yu-Lung 1 - Coggle Diagram

- - - - n=refractive index of medium
      - a is semi acceptance angle of lens
- - - - Low energy electrons ionised out of the sample atom when passed by incident electron
      - <50eV kinetic energy
      - Only occurs near surface and so are topography related
      - Lower energy and smaller specimen volume, resolution: 3-4nm
    - - High angle scattering
      - Caused by incident electron colliding with nucleus
      - Varies with atomic number of sample
      - Give info on atomic number and topography
      - Come from much larger region than secondary electrons
      - Greater penetration depth (10-10nm), larger specimen volume, resolution: 10-50nm
    - - Through thickness
      - Composition info
      - Energy of x-ray = energy difference between shells