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(錯誤代碼分類) 13MF101727_ NIKON FX65S 設備管控指導書 (操作介面) - Coggle Diagram

- - - - passward
        
        ok
- - - - Line
      - Arm Entry
    - - Requesting
      - Executing
    - - Requesting
      - Executing
  - - - slot status
      - Upper: Case sensor
        Lower: mask sensor
    - - vacuum sensor
      - edge sensor
      - mask sensor
- - - - perform the mask particle check
      - register mask information in MAT
    - - mask edit
      - recipe edit
      - vdpp5
      - userdynamic setting
    - - file maintenance
      - error total
      - lot log
      - EGA log
      - calibration log
      - plate transfer recovery
      - mask transfer recovery
      - maintenance software
    - - machine adjustment parameters
      - userdynamic edit
      - system parameters
      - operation mode edit
      - operator management
      - MCSI shut down