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I-chemical (POU (Wet (Tool ID (Chamber)), CVD, CMP, PVD, LIT, Etch, DIF,…
I-chemical
POU
CVD
Wet
Tool ID
Chamber
CMP
PVD
LIT
Etch
DIF
EPI
Facility
Lorry Tank
Day Tank (CDU)
Lorry (CCB)
Mix Tank
VMB
Supply Tank
Drum
Environment
AMC
Chemical
Surface Tension
Viscosity
Ion
Organic Impurity
Fingerprint
Metal Impurity
Assay
Supplier
Material
Batch
Time
Gas
CMP Pad/Disk
CMP Clean
Wafer
Precursor
Target
CMP Slurry
PR
Instrument
Defect