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EUV
WSHS H2 Showers (ACTIONS :checkered_flag: (SOW (Product safety is it…
EUV
WSHS H2 Showers
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TEAM ASML
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Architect Functional - Bas van Elten (NXE/EXE gas safety and infrastructure, EUV pellicle)
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Project
Critical :warning:
High of the filter from heat shield is critical (open space between filter and shield) !! (to distibute pressure) :question:
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