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HPM (GAS) & Chemical Storage (Tools (ECP/ Cu CMP, Thin Films/ Dry…
HPM (GAS) &
Chemical Storage
Chemical Suppliers
BASF
Tai-Young High-
Tech (TYS)
Gas Suppliers
Air Liquide
Air Products
BOC
Taiyo Toyo Sans
大宗氣體
Bulk Gas
氮氣系統 GN2, PN2
氧氣系統 PO2, IO2
氬氣系統 PAr
氦氣系統PHe
氫氣系統 PH2
特殊氣體
Special GAS
燃燒性氣體(Flammable Gas)
SiH4, SiCI2H2, etc.
腐蝕/毒氣性氣體 Corresive/Toxic Gas
CI2,HBr, etc.
氧化性氣體 (Oxidant Gas)
N2O, NF3, etc.
惰性氣體 Inert Gas
CO2, CF4, etc.
依照特性
By Characteristics
酸類: H2SO4, H3PO4, HCI, etc.
鹼類: NH4oH, DEV-1, etc.
氧化類: H2O2, etc.
有機溶劑類 IPA, Thinner-1, etc.
依照供應方式
運送供給方式
大宗化學品(Bluk Chemical),
大型Lorry 桶裝
H2SO4, NH4OH, DEV-1, H2o2, Thinner-1ㄝ
桶裝化學品 Drum Chemical 200L桶
HCI, H3PO4, etc.
混酸化學品 (Mixed Chemical) ON-Line混酸供應
CX100 2%, HF 1%, etc
Tools
ECP/ Cu CMP
Thin Films/ Dry Etch
Wet Bench
Litho
Implemeter
Diffusion
Metrology