Please enable JavaScript.
Coggle requires JavaScript to display documents.
Farbication (Film deposition (Vacuum requirements, PVD, CVD,…
Farbication
Film deposition
Vacuum requirements
PVD
CVD
Alloy/compound deposition
Uniformity
Microstructure
Film stress
Etching
Wet chemical etching
Directional etching
Wet etching of SiO2
Sacrificial layer
Dry etching
Plasma etching
Ion milling
Reactor types
Reactive ion etching
Parallel plate plasma etching
Isotropy/Anisotropy
Etching Si/SiO2
Lithography
Photolithography
Mask
Photoresists
Contact printing
Soft contact printing
Projection printing
Step and repeat system
Phase shifting
X-ray lithography
Ebeam lithography
Ion beam lithography
Self assembly
Lithography in depth