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Hybrid Plasmonics/Photonics (CMOS Compatible (** Resolution (a. FIB, EBL…
Hybrid Plasmonics/Photonics
Plasmonic resonators on photonic waveguide
LSPR
Number
a. Single Particle
b. Array (Periodic chain)
Location
Surface
Embedding
Plasmonic WG (SPP)
Plasmonic WG (Normal)
Plasmonic slot WG
Antenna (as transducer)
Mechanism
Free space --> Dielectric WG
Free space --> Hot spot
Topics
Reducing Loss
Evanescent wave spin-controlled
directional coupling
Metamaterial
{regarded as a whole}
Cloaking
ENZ
Optical switching
CMOS Compatible
Au, Ag (Not CMOS compatible)
Al, Cu {Oxidation}
ITO
TiN
Heavily-doped Semiconductor (Si, InAs, Ge)
** Resolution
a. FIB, EBL (resolution<10nm, Low throughput)
b. CMOS (resolution>20nm, fast)