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SPC chart (PI (膜厚 (物理 (SEM (13点/sheet, Dummy PA, 月检), TEM (13点/sheet,…

- - - - PI THK
        
        25点/sheet
        
        Dummy PA
        
        开线检
        
        Spec
        
        400mesh/19um
        
        Dummy
        
        650±150A
        
        TFT
        
        BP2
        
        500-600A
        
        ITO
        
        400-450A
        
        350meesh/28um
        
        Dummy
        
        850±150A
        
        TFT
    - - SEM
        
        13点/sheet
        
        Dummy PA
        
        月检
      - TEM
        
        13点/sheet
        
        Dummy PA
        
        月检
  - - - 自动检
        
        132点
        
        TFT
        
        Down
        
        CF
        
        UP
        
        Down
        
        频率
        
        片片检
        
        Spec
        
        R/U/L
        
        500±150um
        
        Down(OLB区)
        
        800±150um
      - 手动检(Reivew)
        
        68chips/sheet
        
        30min抽一
    - - 手动检(review)
        
        68chips/sheet
        
        30min抽一
- - - - 基板种类
        
        Dummy PA
      - 检测频率
        
        4CST抽一
        
        10点/sheet
      - 检测内容
        
        Anisotropy
        
        Spec
        
        Dummy 0±2度
        
        Orientation
        
        Spec
        
        Dummy 0-0.4