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Nanofabrication in Lyon (Nanolyon (platform of INL) (Doua (optical…
Nanofabrication in Lyon
Nanolyon (platform of INL)
Centrale Lyon
Doua
optical lithography
microPG 101
MJB4
dicer
ebeam evaporator
ebeam lithography Raith
ENS Lyon
Clean room
spin coater
sputtering for MEB
plasma etching
Quantum circuits
future: Plassys evaporator
optical microscope Leica
wirebonder Westbond
probe station
Grenoble
Paris Centre